Wafer Vacuum Pen
Vacuum Picker
In semiconductor manufacturing processes, when a single wafer needs to be manually selected from a cassette for inspection, a vacuum wafer wand offers a quick and effortless solution. Shen-Yueh’s vacuum pens are made with antistatic PEEK or POM material and feature a polished wafer contact surface to minimize suction loss or wafer drop risk. Each vacuum pen undergoes a suction test exceeding 80 Kpa before delivery to ensure stable and reliable performance, making it ideal for cleanroom and high-purity environments. We also offer customized designs tailored to the user’s specific applications—ranging in functions and dimensions. Accessories such as vacuum silicone tubes, pen bases, and portable vacuum pens are also available. Please feel free to contact us if you have any inquiries.
Key Features
- Shared pen body design, compatible with 4-inch, 6-inch, 8-inch, and 12-inch pen tips
- Pen holder features antistatic design, suitable for high cleanliness process requirements
- Polished suction surface reduces wafer indentation and contamination risks
- Each product undergoes 80Kpa suction test before shipping to ensure stable suction force
- Optional accessories available: vacuum silicone tube, pen stand, portable vacuum pen
Application Environments
- Wafer testing and inspection tasks in semiconductor processes
- Sampling inspection and manual handling during wafer development
- Wafer transfer or equipment operation in cleanroom environments
- Sample handling or equipment testing in laboratories
Product Specifications
Model | Type | Size | Material |
VP-PEN-POM | Vacuum Pen Body | Universal | Antistatic POM (Black) |
VP-PEN-PEEK | Vacuum Pen Body | Universal | Antistatic PEEK (Black) |
Model | Type | Size | Material |
VP-H304-PK | Vacuum Pen Tip | 4 inch (Straight) | Standard PEEK |
VP-H106-PKCF | Vacuum Pen Tip | 6 inch (Straight) | Antistatic PEEK |
VP-H108-PKCF | Vacuum Pen Tip | 8 inch (Straight) | Antistatic PEEK |
VP-H208-PKCF | Vacuum Pen Tip | 8 inch (Bent) | Antistatic PEEK |
VP-H112-PKCF | Vacuum Pen Tip | 12 inch (Straight) | Antistatic PEEK |
VP-H212-PKCF | Vacuum Pen Tip | 12 inch (Bent) | Antistatic PEEK |
VP-TUBE | Vacuum Pen Tube | Universal | Silicone |
Notes
- All vacuum pen holders are compatible with 4 to 12 inch pen tips
- 4 inch pen tip uses standard PEEK, others are antistatic
- Choose pen tips and holders according to usage environment
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Vacuum Pen Base|Built-in Micro Vacuum Pump, No External Air Source Required
Model: VP-BASE-PB01
Ideal for cleanrooms and high-cleanliness processes, enabling flexible and tidy wafer handling.
This desktop vacuum pen base features a built-in micro vacuum pump that generates stable suction without an external air source when used with a vacuum pen.
It is ideal for cleanroom, high-purity processes, and laboratory environments, effectively enhancing operational flexibility and workspace cleanliness.
The pen body can be stably placed on the base to prevent contamination and falling risks, ensuring safer and more convenient use.
Key Features
- Built-in micro vacuum pump, no external air source required
- Includes battery, no external power supply needed
- Stable desktop design for easy placement and access of pen body
- Prevents pen body from contacting table surface, maintaining cleanliness
- Compatible with various vacuum pen models and tip sizes
- Customizable pen base appearance and structure according to user needs
Shen-Yueh Vacuum Pen Base|Demonstration Video
- Files Download
Vacuum pen used in the semiconductor manufacturing department for manual selection of items. | PEEK & PI Plastic CNC Machining Manufacturer | Shen-Yueh (SYT)
Located in Taiwan since 2006, Shen-Yueh Technology co., Ltd. has been a CNC plastic and metal machining manufacturer in Metal Processing Industry. Their main CNC machining supplies include, Wafer Vacuum Pen, CNC plastic machining, air knife productions, PEEK plastic machining and fabrication, CNC metal machining, Polyimide (PI) plastic CNC machining and milling, and bearing, which are delivered with expanded production capacity, short lead time, and better customer service.
SHEN-YUEH is composed of semiconductor equipment and machining design personnel who cooperate with the CNC professional technician team, which has more than 10 years of experience. The production process is carried out in accordance with ISO and a clean factory environment to provide excellent professional consultations and service! We focus on CNC parts processing and equipment transformation experience in the semiconductor and panel industries (since 2006). For more than 10 years, we have solved problems of design, development, and organization optimization and increased the lifecycle of parts, reducing costs for many customers and quickly providing manufacturing samples to reduce customer development time.
Shen-Yueh (SYT) has been offering high-quality equipment part manufacturing for semiconductor manufacturing department, panel and comprehensive industries, both with advanced engineering technology and 13 years of experience, Shen-Yueh (SYT) ensures each customer's demands are met.