Cleanroom Jigs and Measurement Solutions
Focused on Cleanroom Non-Metal Jig Development, covering Precision Measurement to Process Applications
We focus on developing non-metal jigs and measurement solutions for cleanroom use.
While jigs and measurement tools are not the main parts of the equipment, they play a key role in calibration accuracy and post-maintenance process yield. Metal tools may introduce particles, metal contamination, wafer scratching, and ESD risks.
Our solutions are designed based on real engineering use cases and Fab requirements.
Through proper material selection and practical jig design, we help reduce scratching, particle generation, and metal contamination, supporting stable and reliable cleanroom operations.
Our Service Scope
We provide one-stop cleanroom jig and measurement solutions, covering design, machining, and engineering support:
Based on semiconductor equipment maintenance and measurement scenarios, we develop non-metal jigs and measurement tools (jigs / fixtures) suitable for cleanroom environments, supporting equipment calibration, maintenance, and process-related operations.
With CNC machining experience in 0.1 mm-class thin plastic gauges, our tools are suitable for micro-gap measurement and equipment adjustment tasks, helping reduce scratching and interference risks commonly associated with metal tools.
Based on different process conditions, we provide material evaluation and recommendations for non-metal materials such as PEEK, PTFE, and PI / Vespel, suitable for high-temperature, wet process, or ESD-sensitive environments.
According to equipment structure, operation flow, and measurement requirements, we provide custom jig design and low-volume production services, supporting R&D testing, maintenance operations, and process implementation stages.
For measurement-related jigs, we conduct necessary dimensional inspections and offer laser marking or mechanical engraving based on cleanroom usage requirements, supporting product management and basic traceability.
Core Advantages (Why SY-Tech?)
1. Engineering Team with Semiconductor Equipment Background
Our team has hands-on experience with semiconductor equipment, understanding not only machining requirements but also real PM maintenance workflows, such as O-ring removal methods, gap measurement handling, and in-chamber operating conditions. We assist customers in optimizing jig structures and material selection, reducing trial-and-error costs and supporting the establishment of standard maintenance procedures (SOPs).
2. 0.1 mm-Class CNC Precision Plastic Machining Capability
We specialize in CNC machining of high-performance plastics such as PEEK and Vespel, with experience producing 0.1 mm-class thin gauges. Compared to commercially available stamped gauges, we offer more stable dimensional control and greater machining flexibility, suitable for micro-gap measurement applications while reducing scratching risks associated with metal tools.
3. Process-Specific Non-Metal Material Selection
For different process environments, we provide a wide range of non-metal material options, including ESD-safe PEEK, chemically resistant PTFE, and high-temperature PI (Vespel). Through a single contact window, customers can evaluate material suitability under various process conditions, reducing the potential risks of using metal jigs.
4. Custom Design and Flexible Lead-Time Support
We are not limited by standard specifications or minimum order quantities. Based on equipment structure and actual operating needs, we provide long-handle, angled, or specially shaped jig designs. Whether for R&D prototyping or low-volume production for maintenance needs, we flexibly support customer schedules.
5. Quality Inspection and Product Identification Management
For thin-gauge products, dimensional inspections are performed using optical measurement systems. Product identification is applied through laser marking or mechanical engraving based on material and usage environment, avoiding ink contamination and meeting cleanroom and basic traceability requirements.
Solving Common Process Challenges
We address technical challenges caused by metal tools in production environments through engineering solutions:
| Common On-Site Challenges | Our Engineering Solutions |
|---|---|
| Metal gauges scratching coatings / wafers | PEEK Feeler Gauges: Utilize hardness differentials to ensure measurement contact without damaging workpiece surfaces. |
| Damage to seal grooves during O-ring removal | PEEK Removal Jigs: Designed with specific hook geometries to concentrate force on the O-ring while protecting metal grooves. |
| Tool failure during high-temperature maintenance | PEEK / PI Drivers: High heat deflection temperature (HDT) materials maintain mechanical rigidity in 260°C–300°C environments. |
| Electrostatic damage to sensitive components | ESD Tools: Controlled surface resistivity safely dissipates electrostatic charges. |
| Tool corrosion caused by acidic environments | PTFE Tools: Fluoropolymer chemical inertness eliminates oxidation and corrosion issues. |
| Inaccessible micro dead zones for measurement | Custom CNC Machining: Multi-axis CNC machining enables special shapes and long-reach gauges to overcome geometric limitations. |
Applicable Industries and Application Modules
Focused on semiconductor front-end and back-end processes, providing modular non-metal jig support:
Including Etch, PVD, and CVD. Providing showerhead gap measurement, O-ring replacement, and liner removal tools.
Including Diffusion / Furnace. Providing high-temperature-resistant measurement and fastening tools.
Including Wet Bench / Cleaning. Providing acid- and alkali-resistant drivers, wafer handling jigs, and nozzle alignment tools.
Including Lithography and Sorter systems. Providing robot alignment step gauges, cassette inspection jigs, and ESD protection tools.
📘 Case Studies: Improved Measurement Stability and Efficiency
Contact Us / Request Consultation
If you are facing metal magnetic interference or need rapid custom jig development for cleanroom jig and measurement applications, feel free to contact SY-Tech.
You may also fill out the form below, and we will get back to you as soon as possible.
✉️ Email：service@sy-tech.com.tw
With rigorous manufacturing processes and engineering plastic expertise, we consistently support equipment calibration, maintenance, and process requirements as a reliable engineering partner for improving process stability and equipment reliability.
