VESPEL series | CNC Metal & Plastic CNC Machining Manufacturer | Shen-Yueh (SYT)

Focused on High-Performance Vespel Engineering Plastic Components for Semiconductor Equipment SHEN-YUEH offers high-quality Vespel machining services designed for semiconductor equipment, ensuring stable performance under high temperature, vacuum, plasma, chemical-resistant, and low-particle conditions. Our solutions help enhance reliability and productivity in wafer handling, photomask operations, etching, thin-film, and CMP processes. Shen-Yueh (SYT) is a high-quality VESPEL series, CNC Machining, Air Knife, PEEK Plastic Machining, Metal Machining, PI Plastic Machining, Bearing manufacturer from Taiwan since 2006. SHEN-YUEH is composed of semiconductor equipment and machining design personnel who cooperate with the CNC professional technician team, which has more than 10 years of experience. The production process is carried out in accordance with ISO and a clean factory environment to provide excellent professional consultations and service!

SHEN-YUEH provides customized Vespel parts tailored for semiconductor environments. | CNC Metal & Plastic CNC Machining Manufacturer | Shen-Yueh (SYT)

Focused on High-Performance Vespel Engineering Plastic Components for Semiconductor Equipment / We focus on CNC parts processing and equipment transformation experience in the semiconductor and panel industries (since 2006).

SHEN-YUEH provides customized Vespel parts tailored for semiconductor environments.
SHEN-YUEH provides customized Vespel parts tailored for semiconductor environments.

VESPEL series

Focused on High-Performance Vespel Engineering Plastic Components for Semiconductor Equipment

SHEN-YUEH offers high-quality Vespel machining services designed for semiconductor equipment, ensuring stable performance under high temperature, vacuum, plasma, chemical-resistant, and low-particle conditions. Our solutions help enhance reliability and productivity in wafer handling, photomask operations, etching, thin-film, and CMP processes.

Product Features:
  • Customized Machining Capability
    Manufacturing based on customer drawings or reverse engineering from samples. Multiple Vespel grades are available (SP-1 / SP-21 / SP-22 / SP-211 / CR series) to meet semiconductor precision and cleanliness requirements.

  • High-Temperature Resistance & Chemical Durability
    Suitable for vacuum chambers, thermal processes, and plasma environments. Withstands long-term exposure to high temperature, acids/alkalis, and chemical gases, ensuring stable operation.

  • Low-Particle & Cleanroom Compatibility
    Using semiconductor-grade Vespel materials, combined with precision machining, fine chamfering, and clean packaging, to meet stringent cleanroom and high-purity process requirements while minimizing contamination risk.

Applications:
  • Photomask & Optical Fixtures: Photomask Pick, Support Blocks
  • Wafer Handling: Wafer Pins, Pads, Positioning Components
  • Vacuum / Thermal Processes: Insulation Spacers, Fixture Spacers
  • Etching / Thin-Film / CVD / PECVD / Etch Process Components
  • CMP Process: Retaining Rings, Support Fixtures
  • High-purity chemical-resistant components for semiconductor & panel industries

By choosing SHEN-YUEH’s Vespel semiconductor components, you gain the advantages of professional machining and fully customized solutions—improving process reliability, extending part lifetime, and reducing testing time for a more precise and efficient production workflow.

VESPEL series

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VESPEL CR6100 Plastic Machining - Machining of VESPEL CR6100 plastic parts, with customized solutions tailored to each customer’s specific requirements.
VESPEL CR6100 Plastic Machining

We specialize in the machining of VESPEL CR6100 plastic components, providing tailor-made solutions...

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VESPEL Plastic Machining - Vespel plastic machining with customized solutions tailored to customer requirements.
VESPEL Plastic Machining

We specialize in precision machining of Vespel® engineering plastics, particularly for critical...

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VESPEL Gas Flow Component - CNC-machined VESPEL® gas flow component for high-temp environments
VESPEL Gas Flow Component
High-temperature VESPEL / PEEK gas flow component for semiconductor plasma processes

Our Gas Flow Component (Scm, Plasma, Dual Gas) is a small gas-guiding part designed for use in LAM plasma...

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VESPEL PIN - VESPEL PIN offers excellent high-temperature resistance, making it ideal for demanding semiconductor equipment environments.
VESPEL PIN

Our VESPEL PIN products offer outstanding performance, including high-temperature resistance,...

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Wafer Clamp Ring - SY's Wafer CLAMP RING: One of few advanced engineering plastics suited for plasma use.
Wafer Clamp Ring

Shen-Yueh's Vespel Clamp Ring is used in dry etching Applied (AMAT) machines. The wafer clamping...

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Vespel Ring Confinement - Designed for semiconductor processes, the Vespel electrode insulation ring is used in Plasma Etcher systems to effectively isolate electric fields and enhance process stability.
Vespel Ring Confinement

We offer professional manufacturing and customized machining services for electrode insulation...

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Vespel wafer guide - Vespel wafer guide - Designed for high-temp, plasma, and vacuum process guiding needs.
Vespel wafer guide

Our Vespel Wafer Guide is made with DuPont™ Vespel® material and specially designed for guiding...

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VESPEL SP-1 Screw - SHEN-YUEH VESPEL SP-1 SCREW Manufacturer
VESPEL SP-1 Screw

Our Vespel SP-1 Screws are made from high-purity Vespel material, offering excellent thermal...

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VESPEL SP-21 Screw - SHEN-YUEH VESPEL SP-21 SCREW Manufacturer
VESPEL SP-21 Screw

Our Vespel SP-21 Screws are made from graphite-filled wear-resistant grade, providing low friction,...

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VESPEL SCP-5000 Screw - SHEN-YUEH VESPEL SCP-5000 SCREW Manufacturer
VESPEL SCP-5000 Screw

Our Vespel SCP-5000 Screws are made from reinforced plasma-resistant Vespel material, offering...

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Result 1 - 10 of 11

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VESPEL series | CNC Metal & Plastic CNC Machining Manufacturer | Shen-Yueh (SYT)

Located in Taiwan since 2006, Shen-Yueh Technology co., Ltd. has been a CNC plastic and metal machining manufacturer in Metal Processing Industry. Their main CNC machining supplies include, VESPEL series, CNC plastic machining, air knife productions, PEEK plastic machining and fabrication, CNC metal machining, Polyimide (PI) plastic CNC machining and milling, and bearing, which are delivered with expanded production capacity, short lead time, and better customer service.

SHEN-YUEH is composed of semiconductor equipment and machining design personnel who cooperate with the CNC professional technician team, which has more than 10 years of experience. The production process is carried out in accordance with ISO and a clean factory environment to provide excellent professional consultations and service! We focus on CNC parts processing and equipment transformation experience in the semiconductor and panel industries (since 2006). For more than 10 years, we have solved problems of design, development, and organization optimization and increased the lifecycle of parts, reducing costs for many customers and quickly providing manufacturing samples to reduce customer development time.

Shen-Yueh (SYT) has been offering high-quality equipment part manufacturing for semiconductor manufacturing department, panel and comprehensive industries, both with advanced engineering technology and 13 years of experience, Shen-Yueh (SYT) ensures each customer's demands are met.