Chuck PIN
Our CHUCK PIN is custom-designed and precision-machined according to different equipment and clamping requirements, suitable for LAM equipment and other semiconductor manufacturing equipment.
Each pin is tailored to fixture dimensions and process conditions to ensure stable clamping and precise positioning.
Available in PEEK, PVDF, and black antistatic materials, it offers excellent chemical resistance, heat resistance, and low particle generation.
All parts are manufactured and inspected through CNC precision machining to ensure smooth surfaces and accurate fitting, minimizing scratches and contamination while enhancing process stability and efficiency.
Product Advantages
- Custom Manufacturing by Sample or Drawing: Customized design and machining based on customer samples or drawings, supporting small-lot trial production for new equipment testing and maintenance applications.
- Stable Clamping Structure for Higher Yield: High-precision tolerance control ensures accurate positioning and reduces vibration or slippage during processing.
- High Purity and Chemical Resistance: Available in PEEK, PVDF, and black antistatic materials with excellent acid/base resistance, heat resistance, and low particle generation.
- Scratch-Resistant and Low-Particle Design: Polished and rounded surfaces reduce scratches and contamination, maintaining a clean process environment.
- High Rigidity and Long-Term Stability: Engineering-grade plastics provide dimensional stability and wear resistance, extending service life and reducing maintenance costs.
Product Applications
- Semiconductor Etching Process
- Chuck / Holding Structures
- Wet Process / Cleaning Equipment
- Mask / Wafer Handling Fixtures
- Maintenance & Calibration Fixtures
Product Specifications
| Item | Specification | 
| Manufacturing Method | Reverse engineering and machining based on customer drawings or samples, supporting customized dimensions and structural design. | 
| Material Options | Select materials according to process requirements: | 
| ‧ PEEK: High rigidity, heat resistance, and low particle generation; ideal for dry etching and high-temperature environments. | |
| ‧ PVDF: Excellent acid and chemical resistance; suitable for wet process and chemical cleaning applications. | |
| ‧ ESD Grade Black Material: Conductive and clean, reduces electrostatic discharge risks. | |
| Applicable Equipment | LAM EOS, DV series, and other semiconductor process equipment. | 
| Operating Environment | Semiconductor etching, wet process, cleaning, and handling applications. | 
You may also fill out the form below, and our team will contact you promptly to provide tailored solutions and technical support.
PVDF CHUCK PIN with excellent acid and chemical resistance, ideal for wet process environments. | PEEK & PI Plastic CNC Machining Manufacturer | Shen-Yueh (SYT)
Located in Taiwan since 2006, Shen-Yueh Technology co., Ltd. has been a CNC plastic and metal machining manufacturer in Metal Processing Industry. Their main CNC machining supplies include, Chuck PIN, CNC plastic machining, air knife productions, PEEK plastic machining and fabrication, CNC metal machining, Polyimide (PI) plastic CNC machining and milling, and bearing, which are delivered with expanded production capacity, short lead time, and better customer service.
SHEN-YUEH is composed of semiconductor equipment and machining design personnel who cooperate with the CNC professional technician team, which has more than 10 years of experience. The production process is carried out in accordance with ISO and a clean factory environment to provide excellent professional consultations and service! We focus on CNC parts processing and equipment transformation experience in the semiconductor and panel industries (since 2006). For more than 10 years, we have solved problems of design, development, and organization optimization and increased the lifecycle of parts, reducing costs for many customers and quickly providing manufacturing samples to reduce customer development time.
Shen-Yueh (SYT) has been offering high-quality equipment part manufacturing for semiconductor manufacturing department, panel and comprehensive industries, both with advanced engineering technology and 13 years of experience, Shen-Yueh (SYT) ensures each customer's demands are met.
 
 
        	



