Vespel wafer guide | PEEK & PI Plastic CNC Machining Manufacturer | Shen-Yueh (SYT)
Our Vespel Wafer Guide is made with DuPont™ Vespel® material and specially designed for guiding applications in high-temperature, plasma, and vacuum processes. It offers excellent thermal stability, chemical resistance, and low friction properties, effectively reducing particle generation and component wear. This makes it especially suitable for internal transfer systems in semiconductor equipment operating under extended cycles.Precision machining is supported, making it ideal for part replacement, maintenance, or equipment upgrades.If you have any requirements, please fill out the form below — we are ready to assist you. Shen-Yueh (SYT) is a high-quality Vespel wafer guide, Vespel wafer guide - Designed for high-temp, plasma, and vacuum process guiding needs. manufacturer from Taiwan since 2006.
Vespel wafer guide
Our Vespel Wafer Guide is made with DuPont™ Vespel® material and specially designed for guiding applications in high-temperature, plasma, and vacuum processes. It offers excellent thermal stability, chemical resistance, and low friction properties, effectively reducing particle generation and component wear. This makes it especially suitable for internal transfer systems in semiconductor equipment operating under extended cycles.Precision machining is supported, making it ideal for part replacement, maintenance, or equipment upgrades.If you have any requirements, please fill out the form below — we are ready to assist you.
Product Features
- Withstands up to 300°C, suitable for Plasma Etcher / ALD / CVD equipment
- Low friction coefficient reduces particle generation and contamination risk
- High guiding stability, ideal for continuous and long-term use
- Resistant to plasma corrosion and strong chemical durability
- Supports complex designs and precision machining for various tools
Product Applications
- Suitable for internal use in high-temp process tools like Plasma Etcher, CVD, ALD
- Used for guiding and securing wafers in transfer or alignment structures
- Installed in vacuum chambers to restrict movement and stabilize components
- Supports maintenance replacements and cleanroom spare part needs
Product Specifications
This product is fully customizable based on installation space and equipment conditions, including dimensions, grooves, chamfers, mounting holes, and special structural designs.
Supports low-volume production and mixed-model shipments, ideal for development trials, spare part management, and equipment upgrades.
Contact Us
If you are looking for a high-stability Vespel Wafer Guide for high-temperature and corrosive process environments, please fill out the form below.
We will provide drawing suggestions, material recommendations, and fast quotation support to help you complete maintenance, upgrades, and integration tasks smoothly.
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Vespel wafer guide - Designed for high-temp, plasma, and vacuum process guiding needs. | PEEK & PI Plastic CNC Machining Manufacturer | Shen-Yueh (SYT)
Located in Taiwan since 2006, Shen-Yueh Technology co., Ltd. has been a CNC plastic and metal machining manufacturer in Metal Processing Industry. Their main CNC machining supplies include, Vespel wafer guide, CNC plastic machining, air knife productions, PEEK plastic machining and fabrication, CNC metal machining, Polyimide (PI) plastic CNC machining and milling, and bearing, which are delivered with expanded production capacity, short lead time, and better customer service.
SHEN-YUEH is composed of semiconductor equipment and machining design personnel who cooperate with the CNC professional technician team, which has more than 10 years of experience. The production process is carried out in accordance with ISO and a clean factory environment to provide excellent professional consultations and service! We focus on CNC parts processing and equipment transformation experience in the semiconductor and panel industries (since 2006). For more than 10 years, we have solved problems of design, development, and organization optimization and increased the lifecycle of parts, reducing costs for many customers and quickly providing manufacturing samples to reduce customer development time.
Shen-Yueh (SYT) has been offering high-quality equipment part manufacturing for semiconductor manufacturing department, panel and comprehensive industries, both with advanced engineering technology and 13 years of experience, Shen-Yueh (SYT) ensures each customer's demands are met.