VESPEL SP-1 Screw
High Purity, High Temperature Resistance
Our Vespel SP-1 Screws are made from high-purity Vespel material, offering excellent thermal stability, low particle generation, and high dimensional precision. Ideal for semiconductor applications requiring high cleanliness and minimal contamination. The SP-1 grade maintains reliable performance in vacuum chambers, plasma zones, high-temperature areas, photomask handling, and wafer transfer components.
Product Advantages
- High purity and low particle generation, ideal for vacuum and cleanroom environments
- Excellent high-temperature resistance, maintaining strength up to 288–300°C
- Resistant to various chemical gases and acidic/alkaline substances
- High dimensional stability for long-term fastening without loosening
- Customizable head types, thread sizes, and lengths based on drawings
Product Applications
- Etching chamber fasteners for TEL (810-421011-1), AMAT (0020-31740), and LAM equipment
- Vacuum and plasma process structural screws
- Photomask and wafer handling assemblies
- High-temperature fixture and clamping positions
- Cleanroom equipment and jigs
Product Specifications
- Material Grade: Vespel SP-1
- Operating Temperature: Approx. 300°C
- Thread Types: M2–M10, UNC/UNF
- Head Types: Pan Slot, Hexagon, Set Screw
- Customization: Available upon drawing or sample
Material Comparison Table
| Material Grade | Properties | Thread / Head Type | Temperature Range | Product Link |
|---|---|---|---|---|
| Vespel® SP-1 High Purity Grade | ● Unfilled DuPont Vespel® material, low particle, low outgassing ● Stable dimensions and chemical resistance for vacuum/plasma use | Metric: M2–M10 Imperial: UNC/UNF Head: Pan Slot, Hexagon, Set Screw | Approx. 300°C (Continuous Use) | View Product |
| Vespel® SP-21 15% Graphite Filled | ● Self-lubricating, low friction, and wear-resistant ● Long-life fasteners for vacuum and etching environments | Metric: M2–M10 Imperial: UNC/UNF Head: Pan Slot, Hexagon, Set Screw | Approx. 300°C (Continuous Use) | View Product |
| Vespel® SCP-5000 High Strength Composite | ● Enhanced strength and rigidity ● Chemical and plasma resistance for high-temperature applications | Metric: M2–M10 Imperial: UNC/UNF Head: Pan Slot, Hexagon, Set Screw | Approx. 320°C (Continuous Use) | View Product |
Material Selection
We offer multiple Vespel screw materials, including SP-1, SP-21, and SCP-5000. Depending on your process environment, we can help select the optimal grade for your application. To confirm compatibility, please fill out the form below, and our team will assist based on your chamber type and temperature range.
SHEN-YUEH VESPEL SP-1 SCREW Manufacturer | PEEK & PI Plastic CNC Machining Manufacturer | Shen-Yueh (SYT)
Located in Taiwan since 2006, Shen-Yueh Technology co., Ltd. has been a CNC plastic and metal machining manufacturer in Metal Processing Industry. Their main CNC machining supplies include, VESPEL SP-1 Screw, CNC plastic machining, air knife productions, PEEK plastic machining and fabrication, CNC metal machining, Polyimide (PI) plastic CNC machining and milling, and bearing, which are delivered with expanded production capacity, short lead time, and better customer service.
SHEN-YUEH is composed of semiconductor equipment and machining design personnel who cooperate with the CNC professional technician team, which has more than 10 years of experience. The production process is carried out in accordance with ISO and a clean factory environment to provide excellent professional consultations and service! We focus on CNC parts processing and equipment transformation experience in the semiconductor and panel industries (since 2006). For more than 10 years, we have solved problems of design, development, and organization optimization and increased the lifecycle of parts, reducing costs for many customers and quickly providing manufacturing samples to reduce customer development time.
Shen-Yueh (SYT) has been offering high-quality equipment part manufacturing for semiconductor manufacturing department, panel and comprehensive industries, both with advanced engineering technology and 13 years of experience, Shen-Yueh (SYT) ensures each customer's demands are met.


