VESPEL SP-21 Screw
Low Friction, Graphite Filled
Our Vespel SP-21 Screws are made from graphite-filled wear-resistant grade, providing low friction, low wear, and excellent high-temperature stability. Especially suitable for semiconductor components requiring smooth sliding and reduced particle generation. Compared to SP-1, SP-21 performs better in sliding or repetitive contact areas.
Product Advantages
- Graphite-filled formulation for self-lubrication and low friction
- Excellent wear resistance for extended service life
- Maintains high cleanliness for vacuum and etching environments
- Stable up to 288–300°C under continuous use
- Good chemical resistance against acids, alkalis, and process gases
- Customizable thread size, head type, and dimensions
Product Applications
- Etching chamber fasteners for TEL, AMAT, and LAM equipment
- Wafer transfer modules and load-port structural components
- Vacuum and high-temperature process fasteners
- Photomask fixtures and EFEM structural parts
- Cleanroom jigs and motion assemblies
Product Specifications
- Material Grade: Vespel SP-21 (15% Graphite Filled)
- Operating Temperature: Approx. 300°C
- Thread Types: M2–M10, UNC/UNF
- Head Types: Pan Slot, Hexagon, Set Screw
- Customization: Available upon drawing or sample
Material Comparison Table
| Material Grade | Properties | Thread / Head Type | Temperature Range | Product Link |
|---|---|---|---|---|
| Vespel® SP-1 High Purity Grade | ● Unfilled DuPont Vespel® material, low particle, low outgassing ● Stable dimensions and chemical resistance for vacuum/plasma use | Metric: M2–M10 Imperial: UNC/UNF Head: Pan Slot, Hexagon, Set Screw | Approx. 300°C (Continuous Use) | View Product |
| Vespel® SP-21 15% Graphite Filled | ● Self-lubricating, low friction, and wear-resistant ● Long-life fasteners for vacuum and etching environments | Metric: M2–M10 Imperial: UNC/UNF Head: Pan Slot, Hexagon, Set Screw | Approx. 300°C (Continuous Use) | View Product |
| Vespel® SCP-5000 High Strength Composite | ● Enhanced strength and rigidity ● Chemical and plasma resistance for high-temperature applications | Metric: M2–M10 Imperial: UNC/UNF Head: Pan Slot, Hexagon, Set Screw | Approx. 320°C (Continuous Use) | View Product |
Material Selection
We provide multiple Vespel screw grades including SP-1, SP-21, and SCP-5000. Our engineers can help determine the best material based on your process temperature, chamber environment, and chemical exposure. Please fill out the form below for further support.
SHEN-YUEH VESPEL SP-21 SCREW Manufacturer | PEEK & PI Plastic CNC Machining Manufacturer | Shen-Yueh (SYT)
Located in Taiwan since 2006, Shen-Yueh Technology co., Ltd. has been a CNC plastic and metal machining manufacturer in Metal Processing Industry. Their main CNC machining supplies include, VESPEL SP-21 Screw, CNC plastic machining, air knife productions, PEEK plastic machining and fabrication, CNC metal machining, Polyimide (PI) plastic CNC machining and milling, and bearing, which are delivered with expanded production capacity, short lead time, and better customer service.
SHEN-YUEH is composed of semiconductor equipment and machining design personnel who cooperate with the CNC professional technician team, which has more than 10 years of experience. The production process is carried out in accordance with ISO and a clean factory environment to provide excellent professional consultations and service! We focus on CNC parts processing and equipment transformation experience in the semiconductor and panel industries (since 2006). For more than 10 years, we have solved problems of design, development, and organization optimization and increased the lifecycle of parts, reducing costs for many customers and quickly providing manufacturing samples to reduce customer development time.
Shen-Yueh (SYT) has been offering high-quality equipment part manufacturing for semiconductor manufacturing department, panel and comprehensive industries, both with advanced engineering technology and 13 years of experience, Shen-Yueh (SYT) ensures each customer's demands are met.

