VESPEL series
Focused on High-Performance Vespel Engineering Plastic Components for Semiconductor Equipment
SHEN-YUEH offers high-quality Vespel machining services designed for semiconductor equipment, ensuring stable performance under high temperature, vacuum, plasma, chemical-resistant, and low-particle conditions. Our solutions help enhance reliability and productivity in wafer handling, photomask operations, etching, thin-film, and CMP processes.
Product Features:
- Customized Machining Capability
Manufacturing based on customer drawings or reverse engineering from samples. Multiple Vespel grades are available (SP-1 / SP-21 / SP-22 / SP-211 / CR series) to meet semiconductor precision and cleanliness requirements. - High-Temperature Resistance & Chemical Durability
Suitable for vacuum chambers, thermal processes, and plasma environments. Withstands long-term exposure to high temperature, acids/alkalis, and chemical gases, ensuring stable operation. - Low-Particle & Cleanroom Compatibility
Using semiconductor-grade Vespel materials, combined with precision machining, fine chamfering, and clean packaging, to meet stringent cleanroom and high-purity process requirements while minimizing contamination risk.
Applications:
- Photomask & Optical Fixtures: Photomask Pick, Support Blocks
- Wafer Handling: Wafer Pins, Pads, Positioning Components
- Vacuum / Thermal Processes: Insulation Spacers, Fixture Spacers
- Etching / Thin-Film / CVD / PECVD / Etch Process Components
- CMP Process: Retaining Rings, Support Fixtures
- High-purity chemical-resistant components for semiconductor & panel industries
By choosing SHEN-YUEH’s Vespel semiconductor components, you gain the advantages of professional machining and fully customized solutions—improving process reliability, extending part lifetime, and reducing testing time for a more precise and efficient production workflow.
Focus Ring Location Pin
Our Vespel Focus Ring Location Pin is manufactured using DuPont Vespel® SP-1 high-purity engineering...
DetailsVESPEL series | CNC Metal & Plastic CNC Machining Manufacturer | Shen-Yueh (SYT)
Located in Taiwan since 2006, Shen-Yueh Technology co., Ltd. has been a CNC plastic and metal machining manufacturer in Metal Processing Industry. Their main CNC machining supplies include, VESPEL series, CNC plastic machining, air knife productions, PEEK plastic machining and fabrication, CNC metal machining, Polyimide (PI) plastic CNC machining and milling, and bearing, which are delivered with expanded production capacity, short lead time, and better customer service.
SHEN-YUEH is composed of semiconductor equipment and machining design personnel who cooperate with the CNC professional technician team, which has more than 10 years of experience. The production process is carried out in accordance with ISO and a clean factory environment to provide excellent professional consultations and service! We focus on CNC parts processing and equipment transformation experience in the semiconductor and panel industries (since 2006). For more than 10 years, we have solved problems of design, development, and organization optimization and increased the lifecycle of parts, reducing costs for many customers and quickly providing manufacturing samples to reduce customer development time.
Shen-Yueh (SYT) has been offering high-quality equipment part manufacturing for semiconductor manufacturing department, panel and comprehensive industries, both with advanced engineering technology and 13 years of experience, Shen-Yueh (SYT) ensures each customer's demands are met.


