VESPEL Gas Flow Component | PEEK & PI Plastic CNC Machining Manufacturer | Shen-Yueh (SYT)
Our Gas Flow Component (Scm, Plasma, Dual Gas) is a small gas-guiding part designed for use in LAM plasma process environments.It can be manufactured in DuPont™ VESPEL®, anti-static, or standard PEEK materials according to customer requirements.The component features excellent heat resistance, electrical insulation, and chemical stability, allowing it to withstand high temperatures and vacuum conditions in plasma environments while maintaining structural integrity and cleanliness.
Its precision-machined design ensures reliable gas flow guidance, positioning, and support functions, enabling long-term stable performance in semiconductor processes. Shen-Yueh (SYT) is a high-quality VESPEL Gas Flow Component, CNC-machined VESPEL® gas flow component for high-temp environments manufacturer from Taiwan since 2006.
VESPEL Gas Flow Component
High-temperature VESPEL / PEEK gas flow component for semiconductor plasma processes
Scm, Plasma, Dual Gas
Our Gas Flow Component (Scm, Plasma, Dual Gas) is a small gas-guiding part designed for use in LAM plasma process environments.It can be manufactured in DuPont™ VESPEL®, anti-static, or standard PEEK materials according to customer requirements.The component features excellent heat resistance, electrical insulation, and chemical stability, allowing it to withstand high temperatures and vacuum conditions in plasma environments while maintaining structural integrity and cleanliness.
Its precision-machined design ensures reliable gas flow guidance, positioning, and support functions, enabling long-term stable performance in semiconductor processes.
Product Advantages
- Made of DuPont™ VESPEL® material, offering excellent heat resistance and dimensional stability.
- Superior electrical insulation to prevent plasma discharge interference.
- Resistant to acid, alkali, and chemical corrosion, suitable for long-term use in plasma processes.
- Precisely manufactured by CNC machining to ensure consistent gas flow channels.
- Applicable for high-temperature and high-vacuum environments.
- Custom designs available according to customer drawings or specifications, with small-quantity production support.
Product Applications
Available in VESPEL, anti-static, or standard PEEK materials based on process conditions,
featuring outstanding heat resistance, insulation, and chemical resistance, ideal for long-term use in high-temperature and vacuum environments.
- Used as gas guiding or supporting components inside plasma etching processes.
- Auxiliary structures that help direct or isolate gas flow.
- Suitable for high-purity and chemically resistant environments.
- Compatible with LAM systems and other plasma processing equipment.
If you need assistance in evaluating material selection, dimensional design, or customization of gas-guiding components, we provide professional consultation and quotation services.
Please fill out the form below, and we will reply to your request as soon as possible.
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CNC-machined VESPEL® gas flow component for high-temp environments | PEEK & PI Plastic CNC Machining Manufacturer | Shen-Yueh (SYT)
Located in Taiwan since 2006, Shen-Yueh Technology co., Ltd. has been a CNC plastic and metal machining manufacturer in Metal Processing Industry. Their main CNC machining supplies include, VESPEL Gas Flow Component, CNC plastic machining, air knife productions, PEEK plastic machining and fabrication, CNC metal machining, Polyimide (PI) plastic CNC machining and milling, and bearing, which are delivered with expanded production capacity, short lead time, and better customer service.
SHEN-YUEH is composed of semiconductor equipment and machining design personnel who cooperate with the CNC professional technician team, which has more than 10 years of experience. The production process is carried out in accordance with ISO and a clean factory environment to provide excellent professional consultations and service! We focus on CNC parts processing and equipment transformation experience in the semiconductor and panel industries (since 2006). For more than 10 years, we have solved problems of design, development, and organization optimization and increased the lifecycle of parts, reducing costs for many customers and quickly providing manufacturing samples to reduce customer development time.
Shen-Yueh (SYT) has been offering high-quality equipment part manufacturing for semiconductor manufacturing department, panel and comprehensive industries, both with advanced engineering technology and 13 years of experience, Shen-Yueh (SYT) ensures each customer's demands are met.