Vespel Ring Confinement | PEEK & PI Plastic CNC Machining Manufacturer | Shen-Yueh (SYT)
We offer professional manufacturing and customized machining services for electrode insulation rings (Insulator Ring / Shield Ring), suitable for semiconductor process equipment such as Plasma Etchers, CVD equipment, and ALD equipment.
Each product can be tailored to match different chamber structures and process requirements. Featuring excellent high-temperature insulation, plasma resistance, and chemical durability, our insulation rings effectively isolate electric fields, stabilize process zones, and extend equipment lifespan.
Please fill out the form below to contact us — we will respond promptly with consultation and support tailored to your needs. Shen-Yueh (SYT) is a high-quality Vespel Ring Confinement, Designed for semiconductor processes, the Vespel electrode insulation ring is used in Plasma Etcher systems to effectively isolate electric fields and enhance process stability. manufacturer from Taiwan since 2006.
Vespel Ring Confinement
Insulator Ring、 shield ring
We offer professional manufacturing and customized machining services for electrode insulation rings (Insulator Ring / Shield Ring), suitable for semiconductor process equipment such as Plasma Etchers, CVD equipment, and ALD equipment.
Each product can be tailored to match different chamber structures and process requirements. Featuring excellent high-temperature insulation, plasma resistance, and chemical durability, our insulation rings effectively isolate electric fields, stabilize process zones, and extend equipment lifespan.
Please fill out the form below to contact us — we will respond promptly with consultation and support tailored to your needs.
Product Applications
- Semiconductor process chambers (Plasma Etcher / CVD / ALD / Dry Etch)
- Edge ring insulators for wafers, RF electrode interface insulators, Plasma Shield Rings
- Used for electric field isolation, plasma confinement, and process area stabilization inside vacuum chambers
- Compatible with mainstream equipment: LAM Research, TEL, Applied Materials, etc.
Product Features
- High-performance materials: Made of Vespel®, PBI, and other advanced engineering plastics offering excellent insulation, heat resistance, chemical stability, and dimensional stability
- Improved process stability: Effectively confines the plasma area, minimizes edge effects, and reduces particle contamination risk
- Protects critical components: Reduces erosion and thermal load on chambers and electrodes, extending component lifespan
- Flexible manufacturing: Supports low-volume production, drawing services, and sizing recommendations; can be customized to different equipment needs
Product Specifications
- Material options: Vespel® / PI (customized upon request)
- Performance: Heat resistance >300°C, low outgassing, dimensional stability, excellent insulation
- Size options: 6", 8", 12" (custom sizes available)
Contact Us
If you are looking for Vespel Ring Confinement or other electrode insulation solutions, feel free to fill out the form below or contact us directly.
Popular Products
Designed for semiconductor processes, the Vespel electrode insulation ring is used in Plasma Etcher systems to effectively isolate electric fields and enhance process stability. | PEEK & PI Plastic CNC Machining Manufacturer | Shen-Yueh (SYT)
Located in Taiwan since 2006, Shen-Yueh Technology co., Ltd. has been a CNC plastic and metal machining manufacturer in Metal Processing Industry. Their main CNC machining supplies include, Vespel Ring Confinement, CNC plastic machining, air knife productions, PEEK plastic machining and fabrication, CNC metal machining, Polyimide (PI) plastic CNC machining and milling, and bearing, which are delivered with expanded production capacity, short lead time, and better customer service.
SHEN-YUEH is composed of semiconductor equipment and machining design personnel who cooperate with the CNC professional technician team, which has more than 10 years of experience. The production process is carried out in accordance with ISO and a clean factory environment to provide excellent professional consultations and service! We focus on CNC parts processing and equipment transformation experience in the semiconductor and panel industries (since 2006). For more than 10 years, we have solved problems of design, development, and organization optimization and increased the lifecycle of parts, reducing costs for many customers and quickly providing manufacturing samples to reduce customer development time.
Shen-Yueh (SYT) has been offering high-quality equipment part manufacturing for semiconductor manufacturing department, panel and comprehensive industries, both with advanced engineering technology and 13 years of experience, Shen-Yueh (SYT) ensures each customer's demands are met.