Edge Ring | PEEK & PI Plastic CNC Machining Manufacturer | Shen-Yueh (SYT)
Our precision-machined semiconductor edge rings are designed for use in critical processes such as etching, CVD/PVD, and CMP.
The Edge Ring can be custom-designed and manufactured based on your equipment model, wafer size (4”–12”), and process environment requirements. Available materials include stainless steel (SUS) and aluminum alloys (AL), widely applied in etching, CVD/PVD, CMP, diffusion, and other key semiconductor processes. Shen-Yueh (SYT) is a high-quality Edge Ring, Precision-machined semiconductor edge rings for Etch, CVD/PVD, and CMP processes manufacturer from Taiwan since 2006.
Edge Ring
Precision Machining Replacement Parts for Semiconductor Equipment
Our precision-machined semiconductor edge rings are designed for use in critical processes such as etching, CVD/PVD, and CMP.
The Edge Ring can be custom-designed and manufactured based on your equipment model, wafer size (4”–12”), and process environment requirements. Available materials include stainless steel (SUS) and aluminum alloys (AL), widely applied in etching, CVD/PVD, CMP, diffusion, and other key semiconductor processes.
Product Advantages
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Reliable Alternative to OEM Parts
We provide customized manufacturing services to address long lead times and high costs from original suppliers. Reverse engineering based on drawings or samples is supported, from prototyping to mass production. -
High Precision and Consistent Quality
Edge ring geometry directly affects wafer edge uniformity and yield. We control roundness, flatness, and surface roughness through CNC precision machining to ensure stable quality in every batch. -
Clean Manufacturing to Minimize Contamination
We use high-purity materials without recycled content. All machining and packaging follow cleanroom standards to reduce particle contamination. -
Extended Lifetime and Reduced Maintenance Cost
Wear-resistant and high-precision design helps extend service life, reducing replacement frequency and unexpected downtime.
Product Specifications
- Wafer Size: 4” (100 mm), 6” (150 mm), 8” (200 mm), 12” (300 mm)
- Material: SUS 304 / SUS 316L, AL 6061 / AL 7075
- Surface Treatment: Electropolishing (EP), Anodizing, Mechanical Polishing
- Process Application: Etch, CVD / PVD, CMP, Diffusion / Oxidation
- Machining: CNC Turning & Milling
- Tolerance: Up to ±0.01 mm (based on drawing)
※ All specifications are customized based on customer drawings or reverse engineering samples.
Contact Us
For material selection, equipment compatibility, or custom machining support, please contact us:
Email: service@sy-tech.com.tw
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Precision-machined semiconductor edge rings for Etch, CVD/PVD, and CMP processes | PEEK & PI Plastic CNC Machining Manufacturer | Shen-Yueh (SYT)
Located in Taiwan since 2006, Shen-Yueh Technology co., Ltd. has been a CNC plastic and metal machining manufacturer in Metal Processing Industry. Their main CNC machining supplies include, Edge Ring, CNC plastic machining, air knife productions, PEEK plastic machining and fabrication, CNC metal machining, Polyimide (PI) plastic CNC machining and milling, and bearing, which are delivered with expanded production capacity, short lead time, and better customer service.
SHEN-YUEH is composed of semiconductor equipment and machining design personnel who cooperate with the CNC professional technician team, which has more than 10 years of experience. The production process is carried out in accordance with ISO and a clean factory environment to provide excellent professional consultations and service! We focus on CNC parts processing and equipment transformation experience in the semiconductor and panel industries (since 2006). For more than 10 years, we have solved problems of design, development, and organization optimization and increased the lifecycle of parts, reducing costs for many customers and quickly providing manufacturing samples to reduce customer development time.
Shen-Yueh (SYT) has been offering high-quality equipment part manufacturing for semiconductor manufacturing department, panel and comprehensive industries, both with advanced engineering technology and 13 years of experience, Shen-Yueh (SYT) ensures each customer's demands are met.